Discharge system with electron oscillations in the emission region for the positive ion source

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Title	Discharge system with electron oscillations in the emission region for the positive ion source
Authors	Litvinov, P.A. Baturin, V.A.
ORCID
Keywords	glow discharge тлеющий разряд тліючий розряд positive ions позитивні іони положительные ионы ion beam ионный пучок іонний пучок
Type	Article
Date of Issue	2009
URI	http://essuir.sumdu.edu.ua/handle/123456789/9115
Publisher	Видавництво СумДУ
License	Copyright not evaluated
Citation	P.A. Litvinov, V.A. Baturin, J. Nano- Electron. Phys. 1 No2, 48 (2009)
Abstract	Design of the discharge system with electron oscillations in the emission region for the positive ion source was studied. Realization of the conditions for electron oscillation in the emission region of the electrode system allowed to increase the energy efficiency of a glow discharge. Obtained characteristics of the discharge with electron oscillation in the emission region of the discharge chamber allow to conclude about possibility of its application in the positive ion source operating at low pressure in the discharge chamber. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/9115
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)