|Title||Intrinsic Stress Formation at Plasma-Ion Deposition of TiN Coatings in Pulse Potential Mode|
Plasma-based ion deposition
Pulse potential mode deposition
Non-local thermoelastic peak of ion
|Date of Issue||2014|
|Publisher||Sumy State University|
|Citation||Proc. NAP 3, 01PCSI15 (2014)|
Formula for intrinsic stress calculation in coatings deposited from ion flux in the pulse potential mode is derived. The case of deposition of ions with different charges is taken into account. The criterion of applicability of derived formula is proposed which permits determining critical parameters of the pulse potential mode. Calculation of stress in TiN coatings at deposition of low-energy ions Ti+ from filtered vacuum arc plasma is brought. The qualitative agreement of calculated stresses with experimental data is stated. The important role of deposition temperature for intrinsic stress control in deposited coating is noted.
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Наукові видання (ЕлІТ)
|Kalinichenko_Kozionov_Perepelkin_Strel’nitskij.pdf||519,98 kB||Adobe PDF||702|
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