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Title Intrinsic Stress Formation at Plasma-Ion Deposition of TiN Coatings in Pulse Potential Mode
Authors Kalinichenko, A.I
Kozionov, S.A.
Perepelkin, S.S.
Strel’nitskij, V.E.
Keywords TiN coating
Plasma-based ion deposition
Pulse potential mode deposition
Intrinsic stress
Non-local thermoelastic peak of ion
Type Article
Date of Issue 2014
URI http://essuir.sumdu.edu.ua/handle/123456789/37125
Publisher Sumy State University
License
Citation Proc. NAP 3, 01PCSI15 (2014)
Abstract Formula for intrinsic stress calculation in coatings deposited from ion flux in the pulse potential mode is derived. The case of deposition of ions with different charges is taken into account. The criterion of applicability of derived formula is proposed which permits determining critical parameters of the pulse potential mode. Calculation of stress in TiN coatings at deposition of low-energy ions Ti+ from filtered vacuum arc plasma is brought. The qualitative agreement of calculated stresses with experimental data is stated. The important role of deposition temperature for intrinsic stress control in deposited coating is noted.
Appears in Collections: Наукові видання (ЕлІТ)

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