Structural Properties of the SnxSy Films Obtained by the Thermal Vacuum Co-evaporation

Abstract

The present work deals with the study of the structural properties of the SnxSy thin films deposited by the closed-spaced vacuum co-evaporation (CSVCE) method. Calculation of temperature dependencies of the sulfur and tin vapor pressures allows to estimate growth conditions of the films with the stoichiometric composition. The effect of growth conditions on surface morphology and structural properties of SnxSy films were studied. Surface morphology of obtained films was determined by the scanning electron microscope (SEM-102Е). Structural investigations of the films were performed with the X-ray diffraction (XRD) method. The analysis of chemical composition of the layers was carried out by the scanning electron microscope by energy dispersive X-ray (ЕDAX) spectroscopy. Influence of the substrate temperature on chemical composition of thin films and their structural characteristics was also investigated.