Features of Structure of Magnetron Films Si3N4 and SiC
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Date
2013
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Сумський державний університет
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Abstract
By small-angle X-ray scattering and atomic force microscopy shows the features of the structure of thin films of Si3N4 and SiC, deposited by magnetron sputtering on glass substrates.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/33652
Keywords
Small-angle X-ray scattering, Atomic force microscopy, Silicon nitride, Silicon carbide, Thin films
Citation
A.P. Kuzmenko, A.S. Chekadanov, S.V. Zakhvalinsky, et al., J. Nano- Electron. Phys. 5 No 4, 04025 (2013)