Simulation of Reciprocal Space Maps for Thin Ion-Implanted Layers in Yttrium-Iron Garnet Films with Defects

Abstract

Numerical simulation of the reciprocal space maps measured from the ion-implanted single-crystal yttrium-iron garnet films on gadolinium-gallium garnet substrate has been carried out basing on the theoretical model of the triple-crystal dynamical diffractometry of crystalline multilayer systems with inhomogeneous strain distributions and randomly distributed defects. The presence of growth defects in both film and substrate as well as radiation defects created in subsurface layer of nanometer-scale thickness after 90 keV F+ ion implantation was taken into account in the proposed model of the film system.