Дворниченко, Аліна ВасилівнаДворниченко, Алина ВасильевнаDvornychenko, Alina Vasylivna2021-07-202021-07-202021Dvornichenko, A. (2021). Electromigration Effects at Epitaxial Growth of Thin Films: Phase-Field Modeling. Ukrainian Journal of Physics, 66(5), 439. https://doi.org/10.15407/ujpe66.5.4390000-0003-4530-4262https://essuir.sumdu.edu.ua/handle/123456789/84695he epitaxial growth of thin films with regard for the anisotropy of the adsorbate surface dif-fusion induced by electromigration effects has been studied theoretically in the framework ofthe phase-field theory and with the use of numerical simulations. The influence of the coef-ficient of electromigration-induced anisotropic diffusion, which is proportional to the appliedelectric field strength, on the dynamics of growth of the film thickness and the height of sur-face structures, growing surface morphology, statistical characteristics of the surface multilayeradsorbate structures, and distribution of surface structures over their heights is revealed.enCC BY 4.0hase-field methodepitaxial growthsurface structureselectromigrationnumerical simulationstatistical characteristicsArticle