Velykodnyi, Dmytro VolodymyrovychNadimzad, SogolShirzadfar, HamidrezaOdnodvorets, Larysa ValentynivnaProtsenko, Ivan YukhymovychВеликодний, Дмитро ВолодимировичВеликодный, Дмитрий ВладимировичОднодворець, Лариса ВалентинівнаОднодворец, Лариса ВалентиновнаПроценко, Іван ЮхимовичПроценко, Иван Ефимович2010-12-242010-12-2420100000-0002-8112-19330000-0003-3351-93030000-0003-0044-5619http://essuir.sumdu.edu.ua/handle/123456789/1594Automated systems for for obtain film samples and research of srtain deformation properties of sensitive elements of sensors are presented. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/1594enplastic deformationLabVIEWelastic deformationthin filmsMeasurement technique straine deformation properties film materials at the elastic and plastic deformationArticle