Ющенко, Ольга ВолодимирівнаЮщенко, Ольга ВладимировнаYushchenko, Olha VolodymyrivnaЖиленко, Тетяна ІванівнаЖиленко, Татьяна ИвановнаZhylenko, Tetiana Ivanivna2014-10-282014-10-282014Proc. NAP 3, 02MAN07 (2014)0000-0002-9717-30330000-0003-0901-3919http://essuir.sumdu.edu.ua/handle/123456789/37208Based on the three parametric Lorenz system a model, that allows to describe in a self-consistent way the behavior of the plasma-condensate system near phase equilibrium, was developed. Considering the influence of the fluctuations of the growing surface temperature the evolution equation and the corresponding Fokker-Planck equation were obtained. The phase diagram, which determined the system parameters corresponding to the regime of the porous structure formation, was built.encneNanoporous structurePhase equilibriumGrowing surfaceArticle