Please use this identifier to cite or link to this item: http://essuir.sumdu.edu.ua/handle/123456789/37182
Title: Structural and Mechanical Properties of Nanocomposite Nb-Al-N Films
Authors: Ivashchenko, V.I
Skrynskyy, P.L.
Kozak, A.O
Pohrebniak, Oleksandr Dmytrovych 
Timofeyeva, I.I.
Dub, S.N.
Keywords: Nb-Al-N films
AlN films
Magnetron sputtering
Film structure
Mechanical properties
Nanoindentation
Issue Year: 2014
Publisher: Sumy State University
Citation: Proc. NAP 3, 01NTF17 (2014)
Abstract: Nb-Al-N films were deposited by magnetron sputtering of the Nb and Al targets in the Ar-N2 atmosphere on silicon wafers at various currents supplied to the magnetron device with the Al target (IAl=100, 150, 200, 300 mA). The films were studied with XRD, FTIR spectroscopy, as well by nanoindentation and Knoop indentation tests. The films were found to have the nanocomposite nc-B1-NbNx/a-AlN structure and exhibit the nanohardness and Knoop hardness in the ranges of 29-33.5 GPa and 46-48 GPa, respectively. The hardness and elastic modulus has an extreme dependence on IAl.
URI: http://essuir.sumdu.edu.ua/handle/123456789/37182
Type: Article
Appears in Collections:Наукові видання (ЕлІТ)

Views
Other46
Canada1
China11
Czech Republic1
Germany5
Italy1
Russia1
Sweden2
Taiwan1
Ukraine5
United States4
Downloads
Other17
Belarus1
China34
Germany2
Russia2
Sweden1
Slovakia1
Ukraine4
United States2


Files in This Item:
File Description SizeFormatDownloads 
Ivashchenko_Skrynskyy_Kozak_Pogrebnjak_Timofeyeva_Dub.pdf507.97 kBAdobe PDF64Download


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.