Please use this identifier to cite or link to this item: http://essuir.sumdu.edu.ua/handle/123456789/40986
Title: The Electronic Properties of Film Materials Based on Fe and Pt or Ge
Authors: Vlasenko, Oleksandr Volodymyrovych 
Poduremne, Dmytro Vasylovych 
Odnodvorets, Larysa Valentynivna
Keywords: тонкие пленки
тонкі плівки
thin film
интегральные схемы
інтегральні схеми
integrated circuits
термическое испарение
термічне випаровування
thermal evaporation
Issue Year: 2015
Publisher: Sumy state university
Citation: Vlasenko, О.V. The Electronic Properties of Film Materials Based on Fe and Pt or Ge [Текст] / О.V. Vlasenko, D.V. Poduremne, L.V. Odnodvorets ; supervisor I.Yu. Protsenko // Фізика, електроніка, електротехніка: матеріали та програма науково-технічної конференції, м. Суми, 20-25 квітня 2015 р. / Відп. за вип. С.І. Проценко. — Суми: СумДУ, 2015. — С. 141-142.
Abstract: On the basis of thin films in microelectronics made the following elements of integrated circuits (IC): film resistors; electrodes (electrode film capacitors, spiral inductors busducts, installation guides, closures MIS  transistors) contact paths and platforms; auxiliary elements. Electrical connection of metals and semiconductors with metallic conductors is performed using layered condensation and formation of ohmic contacts not rectifier, the quality of which is largely dependent parameters and characteristics of microelectronic devices, their reliability and durability
URI: http://essuir.sumdu.edu.ua/handle/123456789/40986
Type: Theses
Appears in Collections:Наукові видання (ЕлІТ)

Views
Other12
Canada1
China1
Germany3
France1
United Kingdom1
Ukraine3
United States4
Downloads
Other13
China29
Germany2
Ukraine1
United States1


Files in This Item:
File Description SizeFormatDownloads 
Vlasenko_thermal evaporation.pdf414.63 kBAdobe PDF46Download


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.