Selective processes that proceed during formation of aluminum layers near the phase equilibrium in a plasma–condensate system
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2008
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Technical Physics
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Abstract
The mechanisms of pore formation in aluminum condensates produced using a radically new technological approach that is based on self-organized sputtering systems are studied. The main technological parameters of pore formation are found to be determined by the closeness to the phase equilibrium in the plasma–condensate system and by the predominant contribution of structural or field selectivity to atom-by-atom assembling of the condensate.
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Keywords
plasma-condensate system, phase equilibrium
Citation
Perekrestov, V.I. Selective processes that proceed during formation of aluminum layers near the phase equilibrium in a plasma–condensate system [Текст] / V.I. Perekrestov, H.S. Korniushchenko, Y.A. Kosminska // Technical Physics. — 2008. — vol. 53. — No. 10. — pp. 1364-1370