Журнал нано- та електронної фізики (Journal of nano- and electronic physics)

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Regularity of Formation of Vacuum-arc Nitride Coating Based on Multi-component Alloys
(Sumy State University, 2017) Beresnev, V.M.; Шабельник, Юрій Михайлович; Шабельник, Юрий Михайлович; Shabelnyk, Yurii Mykhailovych; Шумакова, Наталія Іванівна; Шумакова, Наталия Ивановна; Shumakova, Nataliia Ivanivna; Nyemchenko, U.S.; Klymenko, S.А.; Manokhin, А.S.
The physical factors, which influence on structural state and phase composition of nitride coatings based on multicomponent alloys obtained by means of vacuum-arc deposition method have been determined. It was shown that the increase in partial pressure of nitrogen ensures the formation of a single phase solid solution with fcc crystal lattice. Under the pressure of nitrogen atmosphere below 10 – 3 Pa, a single phase solid solution with a bcclattice is formed; and within the pressure of nitrogen PN = 10– 3 - 8 × 10– 22 Pa, a two-phase system of solid solutions with bcc and fcc lattices is observed. With an offset potential of – 70 V, a texture [100] is observed; and within the alteration of bias potential of (– 70 V - – 90 V) texture [100] + [111] appears. In the range of Ub from – 120 V to – 150 V, a texture [111] is observed, and, with an increase of bias potential, a texture [111] + [110] is observed.