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Item The chemical transformations in metal films under influence of electron(Bulgarian academy of sciences. Institute of electronics, 1997) Protsenko, Ivan Yuhymovych; Odnodvorets, Larysa Valentynivna; Однодворець, Лариса Валентинівна; Однодворец, Лариса Валентиновна; Чорноус, Анатолій Миколайович; Чорноус, Анатолий Николаевич; Chornous, Anatolii Mykolaiovych; Шовкопляс, Оксана Анатоліївна; Шовкопляс, Оксана Анатольевна; Shovkoplias, Oksana Anatoliivna; Опанасюк, Надія Миколаївна; Опанасюк, Надежда Николаевна; Opanasiuk, Nadiia MykolaivnaIt is known that changed of conditions of the films condensations (vacuum, rate of condensation, the substrate temperature), may be change of chemical composition of the thin films. Some chemical composition, which non- equilibrium in bulk samples, was to passing for polymorphic modifications (see, for example, [1]). They may be formed under influence of the size thermodynamic effects (the change of the phase equilibrium conditions). The further investigations show, what such non- equilibrium phases formed at the thermal annealing of the films samples in vacuum chamber or an electron beam directly in a microscope (the size of the one affected by an electron beam - 15 un) in result of the interaction of the metal atoms with the atoms of residual gases. The experimental results of the investigations of the chemical transition in films with bcс (Cr,V, Mo), fcc (Ni, Co) and hcp (Co, Sc, Y) lattice have been presented in the work.Item Сhemical and structure transition in metallic films under influence of electrons(Technical University of Lublin, 1997) Чорноус, Анатолій Миколайович; Чорноус, Анатолий Николаевич; Chornous, Anatolii Mykolaiovych; Шовкопляс, Оксана Анатоліївна; Шовкопляс, Оксана Анатольевна; Shovkoplias, Oksana Anatoliivna; Овчаренко, Юрій Михайлович; Овчаренко, Юрий Михайлович; Ovcharenko, Yurii Mykhailovych; Проценко, Іван Юхимович; Проценко, Иван Ефимович; Protsenko, Ivan YukhymovychResults of investigation of structure and chemical transition in films Sc, Y and Cr at thermal annealing in vacuum chamber and when heating the films with an electron beam directly and microscope are performed. Was received, what chemical composition of films at prolonged annealing was the same as and at annealing an electron beam. We draw a conclusion that Sc203 is formed from metastable Sc, which is not observed in massive Sc. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/840