Факультет електроніки та інформаційних технологій (ЕлІТ)
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Item Physical-Mechanical Properties of Superhard Nanocomposite Coatings on Base Zr-Ti-Si-N(2013) Погребняк, Олександр Дмитрович; Погребняк, Александр Дмитриевич; Pohrebniak, Oleksandr Dmytrovych; Байдак, В.; Baydak, V.; Береснев, В.М.; Beresnev, V.M.; Турбин, П.; Turbin, P.; Махмудов, Н.; Makhmudov, N.; Ілляшенко, Максим Вікторович; Ильяшенко, Максим Викторович; Illiashenko, Maksym Viktorovych; Колесников, Д.; Kolesnikov, D.; Ташметов, М.; Tashmetov, M.Hard and super hard coatings of Zr-Ti-Si-N of from 2.8 μm to 3.5 μm thickness were fabricated using a vacuum arc source with high frequency stimulation. The samples were annealed in vacuum and in air at 1200 °C. It was found that films with a high Zr and Ti content were thermally stable up to 1180 °C. At the same time, a thin oxide layer of 180 nm to 240 nm was found on the surfaces, which protected the sample from destruction. Below 1000 °C annealing temperature in vacuum, changing of phase composition is determined by appearing of siliconitride crystallites (ß-Si3N4) with hexagonal crystalline lattice and by formation of ZrO2 oxide crystallites. Size of grains of a substitution solid solution (Zr, Ti)N varied from (10 – 12) nm to 25 nm, but Ti concentration in the solid solution increased. In the process of annealing, hardness of the best series of samples increased from (39.6 ±1.4) GPa to 53.6 GPa, which seemed to indicate that a spinodal segregation along grain interfaces was finished. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/33942Item Hard nanocomposite coatings, their structure and properties(Published by InTech, 2012) Погребняк, Олександр Дмитрович; Погребняк, Александр Дмитриевич; Pohrebniak, Oleksandr Dmytrovych; Береснев, В.М.; Береснев, В.Н.; Beresnev, V.M.