Факультет електроніки та інформаційних технологій (ЕлІТ)
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Item The influence of nitrogen pressure on the fabrication of the two-phase superhard nanocomposite (TiZrNbAlYCr)N coatings(Elsevier, 2018) Погребняк, Олександр Дмитрович; Погребняк, Александр Дмитриевич; Pohrebniak, Oleksandr Dmytrovych; Смирнова, Катерина Василівна; Смирнова, Екатерина Васильевна; Smyrnova, Kateryna Vasylivna; Кравченко, Ярослав Олегович; Кравченко, Ярослав Олегович; Kravchenko, Yaroslav Olehovych; Beresnev, V.M.; Zukowski, P.V.; Bondarenko, G.G.The multicomponent nitride coatings from TiZrNbAlYCr high entropy alloy (HEA) were fabricated using the vacuum-arc method. The effect of nitrogen pressure on the crystallite size, elemental and phase composition of (TiZrNbAlYCr)N coatings was investigated. A bias voltage applied to the substrate during the deposition process was −200 V. The partial nitrogen pressure was 0.05 Pa, 0.27 Pa, and 0.5 Pa. Body-centered cubic (BCC) lattice with crystallites of 15 nm in size was formed at the lowest pressure. An increase in the pressure led to the formation of the two-phase structure: BCC phase with crystallite size of 15 nm and face-centered cubic (FCC) phase with crystallite size of about 3.5 nm. The same two-phase state was found in coatings fabricated at 0.5 Pa, while the mean crystallite size was 7 nm. The maximum hardness of the deposited coatings was about 47 GPa.