Effect of substrate temperature on structural and substructural properties of MgO thin films
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Date
2015
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Institute for Single Crystals
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Abstract
In this paper we have studied the influence of substrate temperature deposition on structural and substructural characteristics of magnesium oxide films by X-ray diffraction analysis. The thin films of MgO were prepared by spray pyrolysis technique from magnesium chloride solution. We have established the phase composition, the lattice constant, coherent scattering domain size, microstrain level of the films. The optimal conditions for the application of the homogeneous single-phase films of stoichiometric composition were identified.
Keywords
MgO, спрей піроліз, спрей пиролиз, spray pyrolysis, рентгеноструктурний аналіз, рентгеноструктурный анализ, x-ray diffraction analysis, мікронапруга, микронапряжение, microstrain
Citation
Effect of substrate temperature on structural and substructural properties of MgO thin films [ Текст ] / O.V. Diachenko, A.S. Opanasiuk, D.I. Kurbatov et al. // Functional Materials. - 2015. - No.4 P. - 1-7.