Studying of nanocomposite films’ structure and properties obtained by magnetron sputtering

Abstract

Various approaches to creating multicomponent na-nocomposite coatings of high and superhigh hardness (from 30 to 100 ± 120 GPa) are reviewed with particular emphasis placed on mechanisms underlying the increase in hardness in thin coatings. Nanocomposite Nb-Al-N films fabricated by magnetron sputtering were researched in this work. Two stable crystalline structural states were found in the films: NbNch and solid solution В1-NbxAl1-xNyO1-y, and also an amorphous component associated with aluminum oxynitride with reactive magnetron sputtering. A relationship of substructural characteristics sensitivity with the current and nanohardness and Knoop hardness characteristic was determined in this paper. Recent changes in the range of 29-33.5 GPa and 46-48 GPa, respectively. Initial principle calculations of NbN and Nb2AlN phases and NbN/AlN heterostructures were carried out for the interpretation of the results. Deposited nanocomposite films with the given mechanical properties may be used as wear resistant or protective coatings. On the basis of these results, it can be assumed that two stable crystalline structural states were found in the films: В1-NbNx and solid solution with a composition close to the В1-Nb0.67Al0.33N. The films also contain an amorphous component associated with aluminum nitride.