The chemical transformations in metal films under influence of electron

Abstract

It is known that changed of conditions of the films condensations (vacuum, rate of condensation, the substrate temperature), may be change of chemical composition of the thin films. Some chemical composition, which non- equilibrium in bulk samples, was to passing for polymorphic modifications (see, for example, [1]). They may be formed under influence of the size thermodynamic effects (the change of the phase equilibrium conditions). The further investigations show, what such non- equilibrium phases formed at the thermal annealing of the films samples in vacuum chamber or an electron beam directly in a microscope (the size of the one affected by an electron beam - 15 un) in result of the interaction of the metal atoms with the atoms of residual gases. The experimental results of the investigations of the chemical transition in films with bcс (Cr,V, Mo), fcc (Ni, Co) and hcp (Co, Sc, Y) lattice have been presented in the work.