Using a bias potential in a constant and pulse modes for structural engineering vacuum arc nanocrystalline coatings of zirconium nitride
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Date
2014
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Sumy State University
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Abstract
In order to develop the direction of "structural engineering nitride coatings" in the work conducted systematic
analysis of the impact of the negative bias potential (direct and high-voltage pulse) on the structure,
substructure and mechanical properties of ZrN coatings obtained by vacuum arc evaporation. Defined
boundary value of (– 100 V) DC potential applied to the substrate, below which a high-voltage pulse potential
(– 1200 ... – 2000 V quantity that allows to form peaks bias) makes a decisive contribution to the formation
of preferred orientation of the crystallites with the [110] axis. The highest values of hardness
43 GPa are achieved at a constant potential -70 V. Supply high-voltage pulse shifts the maximum hardness
in the direction of a greater value of the constant potential.
Keywords
Vacuum-arc Deposition method, Mechanical characteristics of coatings, Bias potential, Zirconium nitride
Citation
O.V. Sobol, A.A. Andreev, V.A. Stolbovoy, et al., J. Nano- Electron. Phys. 6 No 4, 04013 (2014)