Electrophysical Properties of Nanodimentional Pt Thin Films
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Date
2012
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Sumy State University
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Abstract
The results of research structural and phase state, electrophysical properties (resistivity, temperature
coefficient of resistance (TCR), strain gauge) of Pt thin films in the range of thicknesses from 7 to 50 nm
were presented. Thin films Pt have fcc structure with lattice parameter a 0,390 nm after annealing. The
temperature dependences characterized by relative large value of resistivity (ρ ~ 10-6 Ohm m) and relative
small value of TCR (β ~ 10-4 K-1) respectively. Strain properties characterized by a wide interval of elastic deformation
(more than 1 %), relatively low value of gauge factor (1,5 – 3 units).
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35013
Keywords
Thin film Pt, Structure and phase state, Temperature coefficient of resistance, Gauge factor, Elastic deformation
Citation
Electrophysical Properties of Nanodimentional Pt Thin Films / I. M. Pazukha, I. Y. Protsenko, K. V. Tyschenko et al.
// Nanomaterials: Applications & Properties (NAP-2012) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2012. - V. 1, No3. - 03TF09