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Title | Plasma Processing Reactor on a Base of Beam Plasma Discharge for Producing and Processing Nanomaterials |
Authors |
Shustin, E.G.
Isaev, N.V. Klykov, I.L. Peskov, V.V. |
ORCID | |
Keywords |
Plasma processing reactor Beam plasma discharge Etching Deposition Graphene |
Type | Conference Papers |
Date of Issue | 2012 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/35407 |
Publisher | Sumy State University |
License | |
Citation | Plasma Processing Reactor on a Base of Beam Plasma Discharge for Producing and Processing Nanomaterials / E. G. Shustin, N. V. Isaev, I. L. Klykov, V. V. Peskov // Nanomaterials: Applications & Properties (NAP-2012) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2012. - V. 1, No4. - 04PITSE08 |
Abstract |
The paper describes the design, modes and applications of novel kind of low pressure plasma processing
reactor based on beam plasma discharge as the plasma source. This reactor ensures flawless
treatment of material surface as well as deposition of specific coatings with strictly defined energy of ions
acting upon a treated surface. Applications of the reactor are represented such as defect-free etching heterostructures
based on GaAs and producing structurally perfect samples of graphene.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35407 |
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