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Title Laser-induced Formation of Conductive Structures on Diamond-like Carbon Films
Authors Chumakov, A.N.
Nikonchuk, I.S.
Poklonski, N.A.
Gorbachuk, N.I.
Obukhov, V.E.
ORCID
Keywords Diamond-like carbon films
Laser modification
Surface resistance
Nanocrystalline graphite
Type Article
Date of Issue 2014
URI http://essuir.sumdu.edu.ua/handle/123456789/37119
Publisher Sumy State University
License
Citation Proc. NAP 3, 01PCSI09 (2014)
Abstract Modification of diamond-like carbon (DLC) films by laser radiation with a wavelength of 532 nm and pulse duration of 18 ns was investigated. The treatment of DLC films with laser fluence over 0.4 J/cm2 was accompanied by the formation of conductive structures with a surface resistance from a few to hundreds kΩ/sq. Dependence of films conductivity from the laser fluence was established. Relationship between energy density of laser radiation and the structural changes in the films, its heating and evaporation is discussed.
Appears in Collections: Наукові видання (ЕлІТ)

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