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Temperature Influence on the Properties of Thin Si3N4 Films
(Sumy State University, 2015) Zakhvalinskii, V.S.; Abakumov, P.V.; Kuzmenko, A.P.; Chekadanov, A.S.; Piljuk, E.A.; Rodriguez, V.G.; Goncharov, I.J.; Taran, S.V.
Applying Raman spectroscopy, small-angle x-ray scattering, and atomic force microscopy it were studied phase composition and surface morphology of nanoscale films Si3N4 (obtained by RF magnetron sputtering).