Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate
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Date
2015
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Sumy State University
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Abstract
The present paper deals with the results of comprehensive research of heated in the air magnetron
copper films by atomic-force and scanning electron microscopy, Raman scattering, IR-Fourier and X-Ray
phase analysis, and spectral ellipsometry. According to the results of nano techniques, the relationship
between amplitude and phase-frequency components of ellipsometric measurements and phase structure
transformations has been established. The structural transition in the vicinity of 573 K, has been found.
Keywords
Nanostructure, Magnetron method, Ceramic Substrate
Citation
A.P. Kuzmenko, A.E. Kuzko, Naw Dint, et al., J. Nano- Electron. Phys. 7 No 4, 04095 (2015)