Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate

dc.contributor.author	Kuzmenko, A.P.
dc.contributor.author	Kuzkо, A.E.
dc.contributor.author	Dint, Naw
dc.contributor.author	Than, Myo Min
dc.contributor.author	Dobromyslov, M.B.
dc.contributor.author	Emelyanov, S.G.
dc.contributor.author	Chervyakov, L.M.
dc.date.accessioned	2016-04-12T07:49:17Z
dc.date.available	2016-04-12T07:49:17Z
dc.date.issued	2015
dc.description.abstract	The present paper deals with the results of comprehensive research of heated in the air magnetron copper films by atomic-force and scanning electron microscopy, Raman scattering, IR-Fourier and X-Ray phase analysis, and spectral ellipsometry. According to the results of nano techniques, the relationship between amplitude and phase-frequency components of ellipsometric measurements and phase structure transformations has been established. The structural transition in the vicinity of 573 K, has been found.	ru_RU
dc.identifier.citation	A.P. Kuzmenko, A.E. Kuzko, Naw Dint, et al., J. Nano- Electron. Phys. 7 No 4, 04095 (2015)	ru_RU
dc.identifier.uri	http://essuir.sumdu.edu.ua/handle/123456789/44568
dc.language.iso	en	ru_RU
dc.publisher	Sumy State University	ru_RU
dc.rights.uri	cne	en_US
dc.subject	Nanostructure	ru_RU
dc.subject	Magnetron method	ru_RU
dc.subject	Ceramic Substrate	ru_RU
dc.title	Nanostructure Changes of Magnetron Copper Films with a Glass Ceramic Substrate	ru_RU
dc.type	Article	ru_RU

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