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Issue Year | Title | Author(s) | Type | Views | Downloads |
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2013 | Immersion Lithography with Using of Photostimulated Etching of Germanium Chalcogenide Films | Danko, V.A.; Indutnyi, I.Z.; Mynko, V.I.; Shepeliavyi, P.E.; Lykanyuk, M.V.; Litvin, O.S. | Conference Papers | -1849915618 | 1396792128 |