Please use this identifier to cite or link to this item:
http://essuir.sumdu.edu.ua/handle/123456789/35630
Or use following links to share this resource in social networks:
Tweet
Recommend this item
Title | Immersion Lithography with Using of Photostimulated Etching of Germanium Chalcogenide Films |
Authors |
Danko, V.A.
Indutnyi, I.Z. Mynko, V.I. Shepeliavyi, P.E. Lykanyuk, M.V. Litvin, O.S. |
ORCID | |
Keywords |
Chalcogenide Glasses Photo-induced Dissolution |
Type | Conference Papers |
Date of Issue | 2013 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/35630 |
Publisher | Sumy State University |
License | |
Citation | Immersion Lithography with Using of Photostimulated Etching of Germanium Chalcogenide Films [Текст] / V.A. Danko, I.Z. Indutnyi, V.I. Mynko et al. // Nanomaterials: Applications & Properties (NAP-2013): 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy: Sumy State University, 2013. - V.2, No3. - 03AET03 |
Abstract |
The new effect of photo-stimulated dissolution of as-evaporated and annealed Ge-based chalcogenide glass (ChG) films was investigated. The etching rate increases with the illumination intensity, and its spectral dependence is correlated with absorption in the film at the absorption edge. The high-frequency diffraction gratings on germanium ChG - more environmentally acceptable compounds than traditionally used arsenic chalcogenides, were recorded by method of interference immersion photolithography with photoinduced etching.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35630 |
Appears in Collections: |
Наукові видання (ЕлІТ) |
Views
![Australia](/flags/au.gif)
1
![Belgium](/flags/be.gif)
1
![Canada](/flags/ca.gif)
1
![China](/flags/cn.gif)
1091493448
![Czechia](/flags/cz.gif)
1
![France](/flags/fr.gif)
2
![Germany](/flags/de.gif)
12145247
![Greece](/flags/gr.gif)
1
![Ireland](/flags/ie.gif)
2673671
![Lithuania](/flags/lt.gif)
1
![Netherlands](/flags/nl.gif)
10671
![Pakistan](/flags/pk.gif)
1
![Romania](/flags/ro.gif)
1
![Russia](/flags/ru.gif)
12
![Singapore](/flags/sg.gif)
1
![South Korea](/flags/kr.gif)
1
![Spain](/flags/es.gif)
1
![Turkey](/flags/tr.gif)
4
![Ukraine](/flags/ua.gif)
101933205
![United Kingdom](/flags/gb.gif)
43233622
![United States](/flags/us.gif)
829428492
![Unknown Country](/flags/--.gif)
101933204
![Vietnam](/flags/vn.gif)
135125
Downloads
![China](/flags/cn.gif)
25
![France](/flags/fr.gif)
1
![Germany](/flags/de.gif)
2
![Ireland](/flags/ie.gif)
2
![Lithuania](/flags/lt.gif)
1
![Netherlands](/flags/nl.gif)
1
![Thailand](/flags/th.gif)
1
![Ukraine](/flags/ua.gif)
305298578
![United Kingdom](/flags/gb.gif)
1
![United States](/flags/us.gif)
305298580
![Unknown Country](/flags/--.gif)
64
![Vietnam](/flags/vn.gif)
1
Files
File | Size | Format | Downloads |
---|---|---|---|
Danko_Photo-induced Dissolution.pdf | 339,22 kB | Adobe PDF | 610597257 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.