Browsing by Author Lykanyuk, M.V.


Showing results 1 to 1 of 1
Issue Year Title Author(s) Type Views Downloads
2013 Immersion Lithography with Using of Photostimulated Etching of Germanium Chalcogenide Films Danko, V.A.; Indutnyi, I.Z.; Mynko, V.I.; Shepeliavyi, P.E.; Lykanyuk, M.V.; Litvin, O.S. Conference Papers 1091493447 610597257