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| Issue Year | Title | Author(s) | Type | Views | Downloads |
|---|---|---|---|---|---|
| 2013 | Immersion Lithography with Using of Photostimulated Etching of Germanium Chalcogenide Films | Danko, V.A.; Indutnyi, I.Z.; Mynko, V.I.; Shepeliavyi, P.E.; Lykanyuk, M.V.; Litvin, O.S. | Conference Papers | 305298579 | 610597256 |