Browsing by Author Rodriguez, V.G.


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2015 Temperature Influence on the Properties of Thin Si3N4 Films Zakhvalinskii, V.S.; Abakumov, P.V.; Kuzmenko, A.P.; Chekadanov, A.S.; Piljuk, E.A.; Rodriguez, V.G.; Goncharov, I.J.; Taran, S.V. Article -2119179271 161367134