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Title Temperature Influence on the Properties of Thin Si3N4 Films
Authors Zakhvalinskii, V.S.
Abakumov, P.V.
Kuzmenko, A.P.
Chekadanov, A.S.
Piljuk, E.A.
Rodriguez, V.G.
Goncharov, I.J.
Taran, S.V.
ORCID
Keywords raman spectroscopy
small-angle x-ray scattering
atomic force microscopy
Type Article
Date of Issue 2015
URI http://essuir.sumdu.edu.ua/handle/123456789/43269
Publisher Sumy State University
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Citation Zakhvalinskii, V.S. Temperature Influence on the Properties of Thin Si3N4 Films [Текст] / V.S. Zakhvalinskii, P.V. Abakumov, A.P. Kuzmenko et al. // Журнал нано- та електронної фізики. — 2015. — Т.7, №4. — 04052-1.
Abstract Applying Raman spectroscopy, small-angle x-ray scattering, and atomic force microscopy it were studied phase composition and surface morphology of nanoscale films Si3N4 (obtained by RF magnetron sputtering).
Appears in Collections: Журнал нано- та електронної фізики (Journal of nano- and electronic physics)

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