Temperature Influence on the Properties of Thin Si3N4 Films

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Title	Temperature Influence on the Properties of Thin Si3N4 Films
Authors	Zakhvalinskii, V.S. Abakumov, P.V. Kuzmenko, A.P. Chekadanov, A.S. Piljuk, E.A. Rodriguez, V.G. Goncharov, I.J. Taran, S.V.
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Keywords	raman spectroscopy small-angle x-ray scattering atomic force microscopy
Type	Article
Date of Issue	2015
URI	http://essuir.sumdu.edu.ua/handle/123456789/43269
Publisher	Sumy State University
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Citation	Zakhvalinskii, V.S. Temperature Influence on the Properties of Thin Si3N4 Films [Текст] / V.S. Zakhvalinskii, P.V. Abakumov, A.P. Kuzmenko et al. // Журнал нано- та електронної фізики. — 2015. — Т.7, №4. — 04052-1.
Abstract	Applying Raman spectroscopy, small-angle x-ray scattering, and atomic force microscopy it were studied phase composition and surface morphology of nanoscale films Si3N4 (obtained by RF magnetron sputtering).
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)