Browsing by Author Tomila, T.V.


Showing results 1 to 1 of 1
Issue Year Title Author(s) Type Views Downloads
2013 Effect of Added Nitrogen on Properties of SiCN Films Prepared by PECVD Using Hexamethyldisilazane Porada, O.K.; Kozak, A.O.; Ivashchenko, L.A.; Ivashchenko, V.I.; Tomila, T.V. Conference Papers 9785 21893