Періодичні видання СумДУ
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Item RF Magnetron Sputtering of Silicon Carbide and Silicon Nitride Films for Solar Cells(Sumy State University, 2014) Zakhvalinskii, V.S.; Piljuk, E.A.; Goncharov, I.Yu.; Rodriges, V.G.; Kuzmenko, A.P.; Taranenko, S.V.; Abakumov, P.A.RF-magnetron nonreactive sputtering method from solid-phase target in argon atmosphere was used for obtaining thin silicon carbide and silicon nitride films, that are used for constructing solar cells based on substrates of single crystal silicon of p-type. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/36380Item Features of Structure of Magnetron Films Si3N4 and SiC(Сумський державний університет, 2013) Kuzmenko, A.P.; Chekadanov, A.S.; Zakhvalinsky, S.V.; Pilyuk, E.A.; Dobromyslov, M.B.By small-angle X-ray scattering and atomic force microscopy shows the features of the structure of thin films of Si3N4 and SiC, deposited by magnetron sputtering on glass substrates. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/33652