Періодичні видання СумДУ
Permanent URI for this communityhttps://devessuir.sumdu.edu.ua/handle/123456789/69
Browse
2 results
Search Results
Item RF Magnetron Sputtering of Silicon Carbide and Silicon Nitride Films for Solar Cells(Sumy State University, 2014) Zakhvalinskii, V.S.; Piljuk, E.A.; Goncharov, I.Yu.; Rodriges, V.G.; Kuzmenko, A.P.; Taranenko, S.V.; Abakumov, P.A.RF-magnetron nonreactive sputtering method from solid-phase target in argon atmosphere was used for obtaining thin silicon carbide and silicon nitride films, that are used for constructing solar cells based on substrates of single crystal silicon of p-type. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/36380Item Diode Based on Amorphous SiC(Сумський державний університет, 2013) Zakhvalinskii, V.S.; Borisenko, L.V.; Aleynikov, A.J.; Piljuk, E.A.; Goncharov, I.; Taran, S.V.Diode structure on the basis of amorphous silicon carbide and p-type polycrystalline silicon (Eurosolar) were obtained with magnetron RF-nonreactive sputtering method from solid-phase target in argon atmosphere. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/33656