Факультет електроніки та інформаційних технологій (ЕлІТ)
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Item Effect of Energy Factors on the Structure and Substructure Characteristics of Hafnium Diboride Films Deposited by RF Magnetron Sputtering(G. V. Kurdyumov Institute for Metal Physics of the N.A.S. of Ukraine, 2020) Гончаров, Максим Миколайович; Гончаров, Максим Николаевич; Honcharov, Maksym Mykolaiovych; Zykov, A.V.; Юнда, Андрій Миколайович; Юнда, Андрей Николаевич; Yunda, Andrii Mykolaiovych; Шелест, Ігор Владиславович; Шелест, Игорь Владиславович; Shelest, Ihor Vladyslavovych; Буранич, Володимир Володимирович; Буранич, Владимир Владимирович; Buranych, Volodymyr VolodymyrovychIn this paper, the influence of energy factors, such as the bias potential, current density, deposition rate, on the formation of the structure and substructure of hafnium diboride films deposited using RF magnetron sputtering is analysed. As shown, the structural changes from a quasi-amorphous to a nanocrystalline state with a growth texture occur due to changes in energy factors.Item Zinc-Nanosystem-Structure Formation Using Anodic-Oxidized Aluminum Membranes(Pleiades Publishing, Ltd., 2017) Корнющенко, Ганна Сергіївна; Корнющенко, Анна Сергеевна; Korniushchenko, Hanna Serhiivna; Перекрестов, Вячеслав Іванович; Перекрестов, Вячеслав Иванович; Perekrestov, Viacheslav Ivanovych; Наталіч, Вікторія Вадимівна; Наталич, Виктория Вадимовна; Natalich, Viktoriia Vadymivna; Загайко, Інна Володимирівна; Загайко, Инна Владимировна; Zahaiko, Inna VolodymyrivnaWe propose a new method for the formation of zinc nanosystems by condensation of a weakly supersaturated Zn vapor in pores of the anodic-oxidized aluminum membrane (AOA)–silicon substrate sys- tem. For this purpose, a weak Zn vapor flow is created by magnetron sputtering of Zn target in a high-purity inert gas atmosphere and maintaining a temperature of the porous AOA membrane outer surface higher than that of the substrate. This drives a directional Zn vapor flow inward membrane parallel to the pore generatrix and favors effective penetration of Zn vapor into the membrane.Item Nanostructured ZnO films for potential use in LPG gas sensors(Elsevier, 2017) Латишев, Віталій Михайлович; Латышев, Виталий Михайлович; Latyshev, Vitalii Mykhailovych; Бересток, Таїсія Олександрівна; Бересток, Таисия Александровна; Berestok, Taisiia Oleksandrivna; Опанасюк, Анатолій Сергійович; Опанасюк, Анатолий Сергеевич; Opanasiuk, Anatolii Serhiiovych; Корнющенко, Ганна Сергіївна; Корнющенко, Анна Сергеевна; Korniushchenko, Hanna Serhiivna; Перекрестов, Вячеслав Іванович; Перекрестов, Вячеслав Иванович; Perekrestov, Viacheslav IvanovychThe aim of the work was to obtain ZnO nanostructures with heightened surface area and to study relationship between formation method and gas sensor properties towards propane-butane mixture (LPG). In order to synthesize ZnO nanostructures chemical and physical formation methods have been utilized. The first one was chemical bath deposition technology and the second one magnetron sputtering of Zn followed by oxidation. Optimal method and technological parameters corresponding to formation of material with the highest sensor response have been determined experimentally. Dynamical gas sensor response at different temperature values and dependencies of the sensor sensitivity on the temperature at different LPG concentrations in air have been investigated. It has been found, that sensor response depends on the sample morphology and has the highest value for the structure consisting of thin nanowires. The factors that lead to the decrease in the gas sensor operating temperature have been determined.Item Formation of porous zinc nanosystems using direct and reverse flows of DC magnetron sputtering(STC Institute for single Crystals, 2017) Латишев, Віталій Михайлович; Латышев, Виталий Михайлович; Latyshev, Vitalii Mykhailovych; Перекрестов, Вячеслав Іванович; Перекрестов, Вячеслав Иванович; Perekrestov, Viacheslav Ivanovych; Корнющенко, Ганна Сергіївна; Корнющенко, Анна Сергеевна; Korniushchenko, Hanna Serhiivna; Загайко, Інна Володимирівна; Загайко, Инна Владимировна; Zahaiko, Inna VolodymyrivnaУ роботі проведено порівняльний аналіз двох механізмів структуроутворення наносистем Zn. У першому класичному варіанті формування наносистем відбувалося на підігрітих підкладках, які розташовані перед магнетронним розпилювачем. Другий варіант заснований на конденсації обернених дифузійних потоків розпиленої речовини на підкладки, які розташовані у порожнині магнетронного розпилювача. Показано, що у порівнянні з класичним варіантом, використання обернених дифузійних потоків призводить до більш вісокої відтворюваності технологічного процесу і до суттєвого підвищення швидості нарощування наносистем.Item Studying of nanocomposite films’ structure and properties obtained by magnetron sputtering(IOP Publishing, 2016) Tleukenov, Y.O.; Plotnikov, S.V.; Erdybaeva, N.K.; Погребняк, Олександр Дмитрович; Погребняк, Александр Дмитриевич; Pohrebniak, Oleksandr DmytrovychVarious approaches to creating multicomponent na-nocomposite coatings of high and superhigh hardness (from 30 to 100 ± 120 GPa) are reviewed with particular emphasis placed on mechanisms underlying the increase in hardness in thin coatings. Nanocomposite Nb-Al-N films fabricated by magnetron sputtering were researched in this work. Two stable crystalline structural states were found in the films: NbNch and solid solution В1-NbxAl1-xNyO1-y, and also an amorphous component associated with aluminum oxynitride with reactive magnetron sputtering. A relationship of substructural characteristics sensitivity with the current and nanohardness and Knoop hardness characteristic was determined in this paper. Recent changes in the range of 29-33.5 GPa and 46-48 GPa, respectively. Initial principle calculations of NbN and Nb2AlN phases and NbN/AlN heterostructures were carried out for the interpretation of the results. Deposited nanocomposite films with the given mechanical properties may be used as wear resistant or protective coatings. On the basis of these results, it can be assumed that two stable crystalline structural states were found in the films: В1-NbNx and solid solution with a composition close to the В1-Nb0.67Al0.33N. The films also contain an amorphous component associated with aluminum nitride.Item Structural features and physico-mechanical properties of AlN-TiB2-TiSi2 amorphous-like coatings(Allerton Press, Inc, 2015) Погребняк, Олександр Дмитрович; Погребняк, Александр Дмитриевич; Pohrebniak, Oleksandr Dmytrovych; Demianenko, A. A.; Pshik, A. V.; Kravchenko, Yu. A.; Sobol, O. V.; Beresnev, V. M.; Amekura, H.; Kono, K.; Oyoshi, K.; Takeda, Y.; Podchernyaeva, I. A.The coating of the AlN–TiB2–TiSi2 system has been produced by the magnetron sputtering of a target. At the hightemperature (900 and 1300°C) actions the coating crystallization to form crystallites of sizes 11–25 nm has been observed. It has been defined that the amorphouslike structure is promising for the use of these coatings as diffusion barriers both as the independent elements and a contacting layer in multilayer wearresistant coatings. It has been shown that the use of the resultant composite as an effec tive protective coating for cutting tools will make it possible to increase the tools wear resistance by more than 30% at the temperature up to 1300°C in the cutting zone.Item Structure and properties of nanocomposite Nb-Al-N films(Pleiades Publishing, Ltd., 2015) Ivashchenko, V.I.; Sobol, O.V.; Skrynskii, P.L.; Погребняк, Олександр Дмитрович; Погребняк, Александр Дмитриевич; Pohrebniak, Oleksandr Dmytrovych; Rogoz, V.N.; Meilekhov, A.A.; Dub, S.N.; Kupchishin, A.I.Nanocomposite Nb–Al–N films prepared by magnetron sputtering have been studied. It has been found that, in the films, there are two stable crystalline structural states, namely, NbNz and B1–Nb1 ⎯ xAlxNyO1 – y, and an amorphouslike component related to aluminum oxynitride upon reactive magnetron sputtering. It has been established that the substructure characteristics are sensitive to the current supplied to an Al target and are related to the Knoop nanohardness and hardness, which change in the ranges of 29–33.5 and 46–48 GPa, respectively. Ab initio calculations for the NbNz and Nb2AlN phases and NbN/AlN heterostructures have been performed to interpret the obtained results for the first time. DItem The effect of Al target current on the structure and properties of (Nb2Al)N films with an amorphous AlN phase(Pleiades Publishing, Ltd, 2015) Ivashchenko, V.I.; Sobol, O.V.; Rogoz, V.N.; Погребняк, Олександр Дмитрович; Погребняк, Александр Дмитриевич; Pohrebniak, Oleksandr Dmytrovych; Meilekhov, A.A.; Dub, S.N.; Kupchishin, A.I.Nanocomposite films based on (Nb2Al)N intermetallic nitride have been obtained by the method of magnetron sputtering. Xray diffraction analysis revealed two stable states of the crystalline structure: (i) NbN with low amount (within 5 at %) of dissolved Al in a composition close to (Nb2Al)N and (ii) an amor phous component related to aluminum nitride formed by reactive magnetron sputtering. The substructural characteristics (grain size and microdeformation level) are sensitive to the current via Al target and exhibit correlation with nanohardness and Knoop hardness of the film, which vary within 29–33.5 and 46–48 GPa, respectively.Item High Temperature Annealing of Ion-Plasma Nanostructured Coatings Based on AlN-TiB2(TiSi2)(Polish Academy of Sciences Institute of Physics, 2014) Погребняк, Олександр Дмитрович; Погребняк, Александр Дмитриевич; Pohrebniak, Oleksandr Dmytrovych; Бондар, Олександр В`ячеславович; Бондарь, Александр Вячеславович; Bondar, Oleksandr Viacheslavovych; Beresnev, V.M.; Abadias, G.; Sobol, O.V.; Pshyk, A.V.; Kolesnikov, D.A.; Belovol, K.O.; Demianenko, A.A.; Komsta, H.The coatings investigated in this paper were deposited via the magnetron sputtering of AlN-TiB2(TiSi2) target in Ar atmosphere. The investigation of structural-phase composition, element composition, morphology and mechanical properties before and after annealing up to 1350 C was carried out. The concentration of elements in the coating was changed after annealing at 900 C and further annealing at 1350 C (especially after annealing at 1350 C). The hardness of as-deposited coatings was 15 GPa, but after annealing at 1350 C the value of hardness increased up to 22 - 23,5 GPa. The value of the viscoplastic index was 0.07. All this provide high damping properties of the coating, and amorphous-like structure makes promising the use of these coatings as diffusion barriers in the form of independent elements, and as a contacting layer in multilayer wear resistant coatings.Item Protection of specimens against friction and wear using titanium-based multicomponent nanocomposite coatings: A review(Springer, 2014) Погребняк, Олександр Дмитрович; Погребняк, Александр Дмитриевич; Pohrebniak, Oleksandr Dmytrovych; Beresnev, V.M.; Pshyk, A.V.; Zhollybekov, B.R.A review of the experimental results of studying multicomponent nanocomposite protective coatings of various chemical compositions (TiAlCrYN, TiAlSiBN, TiAlSiCuN, CrTiAlSiN, and TiHfSiN/NbN/Al2O3) developed in recent years is presented. An analysis of the available data on the chemical composition, hardness, oxidation resistance, thermal stability, friction, wear, adhesion strength, and corrosion properties of nanocomposite coatings with high physicomechanical characteristics is carried out. The application of the nanocomposite coatings in industry is exemplified using the performance characteristics of drills made from a high speed steel covered with a multicomponent protective coating.