Проявление селективных процессов при стационарной неравновесной конденсации Cr

Abstract

Electron diffraction analysis and transmission electron microscopy were used to investigate the formation mechanism of Cr films deposited by direct-current magnetron sputtering on cleaved surface of NaCl single crystal. The tendency to the nucleation oh hyperfine films as a metastable amorphous phase intensifies with increasing energy of condensable atoms as well as with decreasing rate of the film growth and increasing deposition temperature. The amorphous-state-to-crystalline-state transformation occurs during the growing of film and with heavy contribution of diffusion fluxes in the amorphous phase→crystal direction. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/1016