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Title DLC deposition by PECVD at plasma cathode based low-pressure discharge
Authors Gavrilov, N.V.
Mamaev, A.S.
ORCID
Keywords алмазоподобные покрытия
diamond-like coating
алмазоподібні покриття
plasma cathode
плазменный катод
плазмовий катод
Type Conference Papers
Date of Issue 2011
URI http://essuir.sumdu.edu.ua/handle/123456789/20765
Publisher Видавництво СумДУ
License
Citation Gavrilov, N.V. DLC deposition by PECVD at plasma cathode based low-pressure discharge [Текст] / N.V. Gavrilov, A.S. Mamaev // Nanomaterials: applications & properties. Proceedings : 1-st International conference, Alushta, Crimea, 27-30 Semptember 2011 / Edited by: A. Pogrebnjak, T. Lyutyy, S. Protsenko. — Sumy : Sumy State University, 2011. — V.1, P.ІІ. — C. 366-368.
Abstract The characteristics of coatings prepared by acetylene decomposition in nonself-sustained discharge with a plasma cathode have been studied. The initial energy of electrons injected into the plasma was 0,1 – 0,7 keV, energy of ions bombarding the coating was 0,1 – 0,7 keV and the pressure of Ar + C2H2 gas mixture was 0,2 – 1 Pa. Microhardness and wear resistance of coatings were measured by methods of kinetic indentation and ball abrasion. The coatings with high microhardness (40 – 60 GPa) and high wear resistance were deposited on conditions that ion energy exceeded 300 eV. It was shown that coating’s microhardness and internal stresses in the coatings deposited on chamber walls could be reduced by concerted change of voltage accelerating injected electrons and bias voltage applied to samples placed into the plasma. This allows to avoid delamination of coating particles from the walls and to provide high quality coating on samples. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/20765
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