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Title Molybdenum back-contact optimization for CIGS thin film solar cell
Authors Ray, J.R.
Shah, N.M.
Desai, M.S.
Panchal, C.J.
ORCID
Keywords высокочастотное магнетронное распыление
високочастотне магнетроне розпилення
Rf magnetron sputtering
молибденовая тонкая пленка
молібденова тонка плівка
molybdenum thin film
Type Article
Date of Issue 2011
URI http://essuir.sumdu.edu.ua/handle/123456789/22118
Publisher Видавництво СумДУ
License
Citation Molybdenum back-contact optimization for CIGS thin film solar cell [Текст] / J.R. Ray, N.M. Shsh, M.S. Desai, C.J. Panchal // Journal of Nano- and Electronic Physics. — 2011. — Vol.3, № 1, Part IV : Proceedings of the International Symposium on Semiconductor Materials and Devices (ISSMD-2011), Vadodara, India, 28-30 January 2011. — P. 766-775.
Abstract Molybdenum (Mo) thin films are most widely used as an ohmic back-contact in the copper indium diselenide (CIS) and its alloy copper indium gallium diselenide (CIGS) based thin film solar cell. Radio frequency (RF) magnetron sputtering system used to deposit Mo thin films on soda lime glass substrate. The deposition was carried out using argon (Ar) gas at different Ar controlled (working) pressures (1 mTorr to 10 mTorr) and at different RF powers (60 W to 100 W). The influence of both the working pressure and the RF power on the Mo thin films was studied by investigating its structural, morphological, electrical, and optical measurements. The results reveal that a stress-free, low-sheet-resistance (~1 W/􀀀), and reflecting (~ 55 %) Mo thin film was observed at 1 mTorr working pressure and 100 W RF power. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/22118
Appears in Collections: Журнал нано- та електронної фізики (Journal of nano- and electronic physics)

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