Please use this identifier to cite or link to this item: http://essuir.sumdu.edu.ua/handle/123456789/22123
Or use following links to share this resource in social networks: Recommend this item
Title Design optimization of deflection caused after release of multilayer structural membrane of Symmetric Toggle Switch
Authors Maninder, K.
Sharma, Akshdeep
Bansal, Deepak
Kumar, Dinesh
Singh, S.
Rangra, K.J.
ORCID
Keywords высокочастотный микроэлектромеханический переключатель
високочастотний мікроелектромеханічний перемикач
Rf mems switch
вносимые потери
внесені втрати
insertion loss
Type Article
Date of Issue 2011
URI http://essuir.sumdu.edu.ua/handle/123456789/22123
Publisher Видавництво СумДУ
License
Citation Design optimization of deflection caused after release of multilayer structural membrane of Symmetric Toggle Switch [Текст] / K. Maninder, A. Sharma, D. Bansal et al. // Journal of Nano- and Electronic Physics. — 2011. — Vol.3, № 1, Part IV : Proceedings of the International Symposium on Semiconductor Materials and Devices (ISSMD-2011), Vadodara, India, 28-30 January 2011. — P. 787-791.
Abstract This paper presents the optimization in deflection caused by the inbuilt stress generated in mechanical or movable membrane of Symmetric Toggle RF MEMS Switch (STS). The movable membrane of STS was initially fabricated with two different materials, i.e. Chrome and Gold. The simulated deflection at 70°C was 11.9 μm, and experimental deflection was 11-12 μm. We present a study of inbuilt deflection reduction in multimetal movable layers without change in actuation voltage of the switch. The design study was initially carried out on cantilevers and then on structural membrane of STS. STS with proposed multilayer of Cr-Au-Au-Ti-Au has a simulated deflection of 0.56 μm at 70°C. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/22123
Appears in Collections: Журнал нано- та електронної фізики (Journal of nano- and electronic physics)

Views

Australia Australia
1
Canada Canada
7010
China China
29
Germany Germany
2029260
India India
6073550
Iran Iran
28038
Ireland Ireland
294349
Italy Italy
7
Lithuania Lithuania
1
Mongolia Mongolia
1
Netherlands Netherlands
9
Poland Poland
1
Russia Russia
10
Slovakia Slovakia
2
Turkey Turkey
3
Ukraine Ukraine
33234638
United Kingdom United Kingdom
17631949
United States United States
124832610
Unknown Country Unknown Country
75
Vietnam Vietnam
80597

Downloads

China China
16
Germany Germany
210
India India
161193
Lithuania Lithuania
1
Ukraine Ukraine
65453081
United Kingdom United Kingdom
1
United States United States
184212140
Unknown Country Unknown Country
144
Vietnam Vietnam
1

Files

File Size Format Downloads
Maninder.pdf 480.93 kB Adobe PDF 249826787

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.