Please use this identifier to cite or link to this item:
http://essuir.sumdu.edu.ua/handle/123456789/27794
Or use following links to share this resource in social networks:
Tweet
Recommend this item
Title | Fabrication of Low-Roughness Au/Ti/ SiO2/Si Substrates for Nanopatterning of 16-Mercapto Hexadecanoic Acid (MHA) by Dip-Pen-Nanolithography |
Authors |
Kumar, A.
Agarwal, P.B. Gupta, S.K. Sharma, A.K. Kumar, D. Chandra, Shekhar |
ORCID | |
Keywords |
Atomic force microscopy Dip-pen-nanolithography Nanopatterning Self-assembled-monolayers |
Type | Article |
Date of Issue | 2012 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/27794 |
Publisher | Сумський державний університет |
License | |
Citation | A. Kumar, P.B. Agarwal, S.K. Gupta, et al., J. Nano-Electron. Phys. 4 No 2, 22 (2012) |
Abstract |
Silicon based low-roughness Au/Ti/SiO2/Si substrates were fabricated using standard IC fabrication
processes. Evolution of surface roughness during substrate fabrication process was studied. Fabrication
process steps, namely, thermal oxidation and e-beam evaporation for ultra-thin Ti(~ 5 nm)/Au(22 nm)
films, were optimized to result in surface r.m.s roughness ~ 0.2 m and ~ 1.0 nm, after thermal oxidation
and Ti/Au deposition steps respectively. Surface roughness was estimated by atomic force microscope
(AFM) imaging and image analysis. Nano-patterning experiments using thiol based 16-MHA molecular-ink
on fabricated substrates were carried out, under controlled environment conditions, by dip-pen-nanolithography
(DPN) technique. Minimum line-width ~ 60 nm and circular dots radius ~ 175 nm were patterned.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/27794 |
Appears in Collections: |
Журнал нано- та електронної фізики (Journal of nano- and electronic physics) |
Views
![Azerbaijan](/flags/az.gif)
1
![Brazil](/flags/br.gif)
118708701
![Canada](/flags/ca.gif)
3
![China](/flags/cn.gif)
1775824306
![Denmark](/flags/dk.gif)
439501
![France](/flags/fr.gif)
-2043965768
![Germany](/flags/de.gif)
3163
![Greece](/flags/gr.gif)
1
![India](/flags/in.gif)
401077476
![Iran](/flags/ir.gif)
1
![Ireland](/flags/ie.gif)
6328766
![Japan](/flags/jp.gif)
2
![Lithuania](/flags/lt.gif)
56509
![Netherlands](/flags/nl.gif)
9
![Russia](/flags/ru.gif)
16
![Singapore](/flags/sg.gif)
1
![Slovakia](/flags/sk.gif)
2
![South Korea](/flags/kr.gif)
1
![Spain](/flags/es.gif)
1
![Taiwan](/flags/tw.gif)
3
![Thailand](/flags/th.gif)
1
![Turkey](/flags/tr.gif)
1092470
![Ukraine](/flags/ua.gif)
21861
![United Kingdom](/flags/gb.gif)
-2043965769
![United States](/flags/us.gif)
-615076680
![Unknown Country](/flags/--.gif)
141397
![Vietnam](/flags/vn.gif)
113019
Downloads
![Brazil](/flags/br.gif)
1
![China](/flags/cn.gif)
1895766291
![France](/flags/fr.gif)
2
![Germany](/flags/de.gif)
3164
![India](/flags/in.gif)
1
![Lithuania](/flags/lt.gif)
1
![Netherlands](/flags/nl.gif)
1
![Russia](/flags/ru.gif)
1
![Thailand](/flags/th.gif)
1
![Ukraine](/flags/ua.gif)
98708
![United Kingdom](/flags/gb.gif)
1
![United States](/flags/us.gif)
-1101911356
![Unknown Country](/flags/--.gif)
168
![Vietnam](/flags/vn.gif)
1
Files
File | Size | Format | Downloads |
---|---|---|---|
jnep_2012_V4_02022.pdf | 577,15 kB | Adobe PDF | 793956985 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.