An Improved SPICE Model for MEMS Based Capacitive Accelerometers

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Title	An Improved SPICE Model for MEMS Based Capacitive Accelerometers
Authors	Kavitha, C. Madhan, M. Ganesh
ORCID
Keywords	Squeezed film Capacitive accelerometer Thermal effect Damping Electrical attractive force
Type	Article
Date of Issue	2013
URI	http://essuir.sumdu.edu.ua/handle/123456789/31005
Publisher	Сумський державний університет
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Citation	C. Kavitha, M. Ganesh Madhan, J. Nano- Electron. Phys. 5 No 2, 02011 (2013)
Abstract	An improved electrical equivalent circuit for a capacitive MEMS accelerometer, incorporating temperature, pressure and squeezed film effects is reported. The circuit model corresponds to a single degree of freedom (SDOF) vibrating system, including dominant micro physical mechanisms. Static, transient and frequency response analysis are carried out at temperature and pressure ranges of 100 K to 400 K and 30 to 3000 Pa respectively. The effect of these parameters on the resonance frequency, peak displacement and settling time of the accelerometer are determined. Simulations are performed using PSpice® circuit simulator. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/31005
Appears in Collections:	Журнал нано- та електронної фізики (Journal of nano- and electronic physics)