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Title The Design of a Low Power MEMS Based Micro-hotplate Device Using a Novel Nickel Alloy for Gas Sensing Applications
Authors Kantha, Bijoy
Sarkar, Subir Kumar
ORCID
Keywords MEMS
Micro-hotplate
CoventorWareTM
Electro-thermo-mechanical
ZnO
Type Article
Date of Issue 2014
URI http://essuir.sumdu.edu.ua/handle/123456789/34314
Publisher Сумський державний університет
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Citation Bijoy Kantha, Subir Kumar Sarkar, J. Nano- Electron. Phys. 6 No 1, 01004 (2014)
Abstract In this paper comparative analysis of MEMS (Micro-electro-mechanical System) based Micro-hotplate using three different heating elements use as separately are presented. Three different materials (viz. DilverP1, Polysilicon, and Platinum) are used as heating elements with same thickness of 0.2 µm. CoventorWareTM simulator has been used for construction of 3D model and electro-thermo-mechanical analysis of Micro-hotplate device. Power consumption, stress and displacement of Micro-hotplate are studied at operating temperature (165 ºC). It is obtained that power consumption, stress and displacement of Dilverp1 heating element are 13.06 mW, 190 MPa and 0.028 µm which are less in comparison to those with Poly Silicon heater and Platinum heater at moderate temperature (150-200 °C) over the sensing material (ZnO). When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/34314
Appears in Collections: Журнал нано- та електронної фізики (Journal of nano- and electronic physics)

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