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Title Graphite Nanostructures Produce in the Acetylene, Argon-Acetylene and Argon-Hydrogen-Acetylene Plasmas
Authors Grigonis, A.
Marcinauskas, L.
Carnauskas, M.
Kaliasas, R.
Keywords Graphite nanostructures
Acetylene
Plasma
Type Conference Papers
Date of Issue 2012
URI http://essuir.sumdu.edu.ua/handle/123456789/35388
Publisher Sumy State University
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Citation Graphite Nanostructures Produce in the Acetylene, Argon-Acetylene and Argon-Hydrogen-Acetylene Plasmas / A. Grigonis, L. Marcinauskas, M. Carnauskas, R. Kaliasas // Nanomaterials: Applications & Properties (NAP-2012) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2012. - V. 1, No4. - 04PITSE02
Abstract The amorphous carbon films were deposited on silicon-metal substrates by plasma jet chemical vapor deposition (PJCVD) and plasma enchanted CVD (PECVD). PJCVD carbon coatings have been prepared at atmospheric pressure in Ar/ C2H2 and Ar/H2/C2H2 mixtures. The films prepared in Ar/C2H2 plasma are attributed to graphite-like carbon films. Addition of the hydrogen decreases growth rate and the surface roughness of the coatings, but coatings have low fraction of oxygen (~5 at.%) The formation of the nanocrystalline graphite was obtained in Ar/H2/C2H2 plasma. The carbon nanotubes were synthesed by PECVD using Au/Cr catalyst particles at low (≤ 450 C; p = 40 Pa ) temperature in pure acetylene. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35388
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