Please use this identifier to cite or link to this item:
http://essuir.sumdu.edu.ua/handle/123456789/35398
Or use following links to share this resource in social networks:
Tweet
Recommend this item
Title | Characteristics of DLC Coating Prepared by Pulse Biasing: Analysis in Model of Thermoelastic Peak of Ion |
Authors |
Kalinichenko, A.I.
Strel'nitskij, V.E. Vasyliev, V.V. |
ORCID | |
Keywords |
DLC coating Plasma-based ion deposition Pulse mode deposition Intrinsic stress Phase P Tdiagram of carbon Non-local thermoelastic peak of ion |
Type | Conference Papers |
Date of Issue | 2012 |
URI | http://essuir.sumdu.edu.ua/handle/123456789/35398 |
Publisher | Sumy State University |
License | |
Citation | Kalinichenko, A. I. Characteristics of DLC Coating Prepared by Pulse Biasing: Analysis in Model of Thermoelastic Peak of Ion / A. I. Kalinichenko, V. E. Strel'nitskij, V. V. Vasyliev // Nanomaterials: Applications & Properties (NAP-2012) : 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy : Sumy State University, 2012. - V. 1, No4. - 04PITSE07 |
Abstract |
A mode of pulse biasing of DLC coating deposition is theoretically investigated. In this mode a deposited
ion flow of plasma with energy of E0 (20 200) eV is modified by superimposing of pulse potential
~ 1000 V. It was shown that intrinsic stress in a DLC coating can be decreased in several times without of
essential decrease of sp3-bonded carbon concentration compared with DLC made in stationary mode deposition
at E0 ion energy. A method of optimization of pulse mode parameters is proposed which is based on
analysis of location of thermoelastic peaks of ions on phase P, T-diagram of carbon.
When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35398 |
Appears in Collections: |
Наукові видання (ЕлІТ) |
Views
![Canada](/flags/ca.gif)
1
![China](/flags/cn.gif)
695981
![France](/flags/fr.gif)
1
![Germany](/flags/de.gif)
6
![Greece](/flags/gr.gif)
1
![Ireland](/flags/ie.gif)
28920
![Lithuania](/flags/lt.gif)
1
![Russia](/flags/ru.gif)
8
![Singapore](/flags/sg.gif)
695982
![Turkey](/flags/tr.gif)
1
![Ukraine](/flags/ua.gif)
188822
![United Kingdom](/flags/gb.gif)
96112
![United States](/flags/us.gif)
3798974
![Unknown Country](/flags/--.gif)
92
![Vietnam](/flags/vn.gif)
5104
Downloads
![China](/flags/cn.gif)
14
![Germany](/flags/de.gif)
2
![Japan](/flags/jp.gif)
6
![Ukraine](/flags/ua.gif)
376908
![United Kingdom](/flags/gb.gif)
1
![United States](/flags/us.gif)
3798975
![Unknown Country](/flags/--.gif)
45
![Vietnam](/flags/vn.gif)
1
Files
File | Size | Format | Downloads |
---|---|---|---|
princon_2012_1_4_42.pdf | 279,1 kB | Adobe PDF | 4175952 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.