Ion Probe with Primary ion Beam Prism Mass Separator

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Title	Ion Probe with Primary ion Beam Prism Mass Separator
Authors	Kuzema, O.S. Kuzema, P.O.
ORCID
Keywords	Ion Probe Magnetic Prism Ion Focusing Energy Analyzer Mass Analyzer Electrostatic Lens Resolution
Type	Conference Papers
Date of Issue	2013
URI	http://essuir.sumdu.edu.ua/handle/123456789/35627
Publisher	Sumy State University
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Citation	Kuzema, O.S. Ion Probe with Primary ion Beam Prism Mass Separator [Текст] / O.S. Kuzema, P.O. Kuzema // Nanomaterials: Applications & Properties (NAP-2013): 2-nd International conference, Alushta, the Crimea, September 17-22, 2012 / Edited by: A. Pogrebnjak. - Sumy: Sumy State University, 2013. - V.2, No3. - 03AET04
Abstract	It has been considered the ion-optical properties and characteristics of ion microprobe analyzer in which the primary ion beam mass separation is realized by the magnetic prism, and the beam spherical capacitor is used in the secondary ion analyzing system as energy analyzer which form parallel ion beam at the mass analyzer inlet. It has allowed to improve the instrument parameters and to scale down its overall dimension. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35627
Appears in Collections:	Наукові видання (ЕлІТ)