Structure аnd Physical-Mechanical Properties of nc-TiN Coatings Obtained by Vacuum-Arc Deposition and Deposition with HF Discharge

Abstract

Using the scanning electron microscopy (SEM), X-ray diffraction (XRD) analysis, adhesion strength, friction coefficient, and wear rate of the material we have studied properties of nc-TiN coatings. Depending on the bias potential applied to the substrate and the chamber pressure, the inclusion of HF discharge, it is shown that combination of different parameters recorded during scratching allows to distinguish the threshold values of the critical load which are linked to different types of cohesive and adhesive fracture of coatings in tribological tests. Sizes of nc-TiN nanograins, stoichiometry of coatings, as well as the phase and elemental composition and morphology of the coating surface were determined. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/35999