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Title Small Angle X-ray Scattering in Thin Iron Films
Authors Chekadanov, A.S.
Kuzmenko, A.P.
Emelyanov, S.G.
Chevyakov, L.M.
Dobromyslov, M.B.
ORCID
Keywords Small angle X-ray scattering
Atomic force
Scanning electron
Digital holographic microscopy
Thin magnetron films
Type Article
Date of Issue 2014
URI http://essuir.sumdu.edu.ua/handle/123456789/36258
Publisher Sumy State University
License
Citation A.S. Chekadanov, A.P. Kuzmenko, S.G. Emelyanov, et al., J. Nano- Electron. Phys. 6 No 3, 03023 (2014)
Abstract By small angle X-ray scattering (SAXS) and atomic force microscopy characteristic sizes are deter-mined, structural features of thin iron films deposited by magnetron evaporation onto substrates from py-roceramics are established. It is shown that morphologically the film is characterized by disorder. It is formed from columnar nano crystallites that are oriented either perpendicular to the substrate or situated in its plane, which dictates polydispersity of those coatings. It is shown that SAXS may be thought of as nondestructive technique for analyzing structure and composition and conducting quality control of mag-netron films. When you are citing the document, use the following link http://essuir.sumdu.edu.ua/handle/123456789/36258
Appears in Collections: Журнал нано- та електронної фізики (Journal of nano- and electronic physics)

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