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Title Modeling of Etching Nano-surfaces of Indium Phosphide
Authors Khrypko, S.L.
Kidalov, V.V.
Kolominska, E.V.
Keywords InP
Porous
Modeling
Nano-surfaces
Type Article
Date of Issue 2015
URI http://essuir.sumdu.edu.ua/handle/123456789/39046
Publisher Sumy State University
License
Citation S.L. Khrypko, V.V. Kidalov, E.V. Kolominska, J. Nano- Electron. Phys. 7 No 1, 01003 (2015)
Abstract This paper describes a mechanism for obtaining a regular porous structure InP, which is to use the method of photoelectrochemical etching. Through the use of simulation etching at the nanoscale, it is possible to get a regular uniform grid of nanopores on the surface of indium phosphide, which allows us to understand the mechanisms and the establishment of technological regimes anodic structures indium phosphide to produce a variety of devices.
Appears in Collections: Журнал нано- та електронної фізики (Journal of nano- and electronic physics)

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