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Title Ion Recrystallization and Spheroidization in Amorphous AlN-TiB2-TiSi2 as a Result of Annealing and Subsequent Implantation by Negative ion Au –
Authors Demianenko, A.O.
Bondar, O.V.
Honcharov, Oleksandr Andriiovych
Partyka, J.
Borba, S.
Keywords Annealing
Implantation
Nanocomposite
Phases
Ions Au
Amorphous
Type Conference Papers
Date of Issue 2015
URI http://essuir.sumdu.edu.ua/handle/123456789/42783
Publisher Sumy State University
License
Citation Ion Recrystallization and Spheroidization in Amorphous AlN-TiB2-TiSi2 as a Result of Annealing and Subsequent Implantation by Negative ion Au – [Текст] / A.O. Demianenko, O.V. Bondar, A.A. Goncharov et al. // Nanomaterials: Applications & Properties (NAP-2015) : Proceedings of the International Conference. — Sumy : Sumy State University, 2015. — V.4, No1. — 01PISERE02.
Abstract This paper presents new results on investigation of the influence of Au- negative ion beam implantation and thermal annealing under 900 °C and 1300 °C on structure and characteristics of AlN-TiB2-TiSi2 coatings prepared by magnetron sputtering. Using scanning electron microscope (SEM) with microanalysis (EDS), atomic force microscopy (AFM), X-Ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM) investigated the crystal structure, surface topography, microstructure were characterized.
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