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Title About Peculiarities of the Influence of the Negative Bias Potential Applied to the Substrate During the Deposition Process on the Structural State and Properties of the Multilayer system MoN-CrN
Authors Beresnev, V.M.
Sobol’, O.V.
Pohrebniak, Oleksandr Dmytrovych  
Nyemchenko, U.S.
Grankin, S.S.
Stolbovoy, V.A.
Turbin, P.V.
Meylehov, A.A.
Arseenko, M.Ju.
Keywords Vacuum-arc coatings
Multilayer coating
Hard coatings
Vacuum-arc deposition
Type Conference Papers
Date of Issue 2015
URI http://essuir.sumdu.edu.ua/handle/123456789/42799
Publisher Sumy State University
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Citation About Peculiarities of the Influence of the Negative Bias Potential Applied to the Substrate During the Deposition Process on the Structural State and Properties of the Multilayer system MoN-CrN [Текст] / V.M. Beresnev, O.V. Sobol', A.D. Pogrebnjak et al. // Nanomaterials: Applications & Properties (NAP-2015) : Proceedings of the International Conference. — Sumy : Sumy State University, 2015. — V.4, No1. — 01FNC01.
Abstract Applying transition metal nitrides of Mo and Cr, which are characterized by a relatively low heat of formation, as the components of the multilayer coating, the possibilities of elemental and structural engineering of vacuum-arc coatings under the influence of the bias potential Us and the reaction gas pressure PN are revealed. It was found that at a relatively small thickness of the layers of nanometer range, which provides superhard state of the coatings, the supply of Us with the value of above the critical leads to a drop in hardness, which can be explained by mixing of layers at the interphase boundary.
Appears in Collections: Наукові видання (ЕлІТ)

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